Figure 1 Schematic diagram of negative pressure sensor detection principle
PS pressure sensor is an electronic pressure sensor made of semiconductor diaphragm structure,
Figure 1 shows the cross-sectional structure of the PS pressure sensor,
Figure 4 shows an example of the peripheral circuit design of a PS pressure sensor,
The sensor uses an alumina membrane and a base plate arranged close to each other to form a capacitor.
Structural diagram of capacitive intake manifold pressure sensor 2
